Silicon Carbide Components For Semiconductor Equipment

Silicon Carbide Components For Semiconductor Equipment

HuaCera silicon carbide has a thermal expansion coefficient that matches that of silicon,and possesses a high elastic modulus, high rigidity, chemical inertness, extremely high wear resistance, and dimensional thermal stability.
Using low-cost forming methods such as dry pressing and cold isostatic pressing,while maintaining a high level of purity (greater than 99.9%), it is an ideal choice for equipment used in semiconductor lithography, wafer metrology, bonding, and cleaning
processes.
Main applications include: vacuum chucks, precision components (guide rails, platforms, bases), silicon carbide mirrors, carriers, robotic arms, and other structural components, and can also be used as high-temperature furnace tubes.